Static SIMS (surface analysis)

High energy primary ions are used to dislodge secondary ions from the surface molecular layers. These ions are analysed by mass spectrometry, producing a spectrum to identify both organic and inorganic species.

Imaging SIMS (spatial analysis)

Scanning the focused primary ion beam over the sample surface builds up an image showing the distribution of any species.This is ideal for analysing the uniformity of coatings or the composition of small features.

Dynamic SIMS (depth analysis)

By concentrating the primary beam into a small area, the surface layers are progressively etched away. This produces an analysis of the subsurface region, monitoring the thickness and composition of thin films.